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Reliable Fabrication Techniques of SiNW Based Nanosensors
- Authors
- Kim, Bruce; Aleem, M.; Selvarathinam, T.; Kundu, S.; 이정희; Park, J.
- Issue Date
- 11월-2023
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Citation
- 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023, pp 595 - 599
- Pages
- 5
- Journal Title
- 2023 IEEE Nanotechnology Materials and Devices Conference, NMDC 2023
- Start Page
- 595
- End Page
- 599
- ISSN
- 0000-0000
- Abstract
- This paper provides silicon nanowire based nanosensors with fabrication techniques that would reduce contamination due to intrinsic properties of silicon nanowires. We provide surface functionalization for explosive analytes such as TNT and RDX analytes. We provide FTIR characterizations of functionalized silicon nanowires to validate surface modification. ？ 2023 IEEE.
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