전기저항형 금속산화물 센서의 인쇄공정 최적화에 관한 연구

Abstract

In this paper, we have studied about the optimum fabrication condition of the printed Indium Tin Oxide (ITO) layers for the electrical resistance-type sensor application. We have investigated on the substrates surface treatments, mixing ratio of organic binder/ITO powder, and viscosity of the printing paste to determine the optimum condition of the screen printed ITO layer. Also, we found that the printing condition is closely related with the sensor performance. To know thefeasibility of printed ITO layer as an electrical resistance-type sensor, we have fabricated the ITO sensors with a printed and sputtered ITO layers. The printed ITO films revealed 102 times higher sensitivity than the sputtered ITO layer.Also, the sputtered ITO layer exhibited an operating temperature of 127℃ at the operating voltage of 5 V. While, in case of the printed ITO layer showed the operating temperature of 27.6℃ in high operating voltage of 30 V. We found that the printed ITO layer is suitable for the various sensor applications.