Optimization of Low Temperature Debinding Process for Metal-oxide Nano-powder Printed Films

Abstract

ITO (Indium-Tin-Oxide) is a metal-oxide semiconductor that can be applied to various fields such as transparent electrode and various sensors. Although ITO nano-powder printed films can be applied to various applications[1], high temperature (~400 ℃) thermal treatment is necessary to improve the properties of ITO printed films. In this study, low temperature debinding process of ITO printed films has been studied. The ITO printed films were debinded at 40℃, and the debinded layer was removed through sonicating in DI water. Fig 1 shows that the thickness of ITO printed film is decreased. Also, from the resistivity and XRD (X-ray diffraction) characterization, the electrical property of the film was improved without degradation of the physical property of the printed film.