해저 광통신망을 위한 새로운 형상의 MEMS 광스위치 설계

Abstract

Electrostatic comb actuators are widely used in MEMS(Micro-Electro-Mechanical-System) devices, specially in MOEMS(Micro-Opto-Electro-Mechanical System) devices. These comb actuators often employ rectangular fingers which produce a stable and constant force output. However these comb actuators may be unstable in side direction as comb fingers engage. This paper introduces a novel comb actuators with sawtooth-type comb fingers, which substantially improves the side stability of comb actuators, since it has low side directional electrostatic force. This improvement of side stability is analyzed though finite element simulation in CoventorWare. The analyzed comb actuators have been designed for applications requiring large displacement of 100㎛. At the maximum engagement of comb fingers, side instability parameter of sawtooth-type comb finger actuator decreases by 144% than that of rectangular one. Also, stable actuation range of sawtooth-type comb finger actuator is 0.55㎛ longer than that of rectangular comb finger actuator.