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A Study on the Surface Treatment Process of Surface-resistive ITO Film Sensors; [표면저항형 ITO 필름 센서의 표면처리 공정에 관한 연구]

Authors
Kim, DongjunAn, SangsuLee, ChanghanCho, YoungjiHan, MincheolBae, ChanyoungJeon, JunsuSong, YujinChang, JihoHa, Yun-SuPark, Jae-JinLee, Moonjin
Issue Date
1월-2024
Publisher
Korean Physical Society
Keywords
Hazardous chemicals; Indium-tin-oxide; Metal-oxide nanoparticles; Organic binder; Surface-resistive sensor
Citation
New Physics: Sae Mulli, v.74, no.1, pp 100 - 106
Pages
7
Journal Title
New Physics: Sae Mulli
Volume
74
Number
1
Start Page
100
End Page
106
URI
https://www.kriso.re.kr/sciwatch/handle/2021.sw.kriso/10680
DOI
10.3938/NPSM.74.100
ISSN
0374-4914
2289-0041
Abstract
A sensor that can measure the concentration of harmful chemicals in water using changes in surface resistance was fabricated using a metal oxide nanoparticle film, and the changes in sensor performance due to surface treatment processes were investigated. The influence of the surface residue of the organic binder used for film printing was focused on, and the changes in the properties of the film and sensor were observed. To remove the residual binder, a cleaning process was additionally introduced to the existing sintering process, and the changes in the properties of the ITO:CB film were observed according to the cleaning time, and the surface treatment time was optimized. It was confirmed that the sensor response improved as the cleaning time increased, and the optimal surface treatment conditions were determined to ensure good sensor operation. ? 2024 Korean Physical Society. All rights reserved.
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해양공공디지털연구본부 (해사안전·환경연구센터)
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