A Study on the Surface Treatment Process of Surface-resistive ITO Film Sensors; [표면저항형 ITO 필름 센서의 표면처리 공정에 관한 연구]
- Authors
- Kim, Dongjun; An, Sangsu; Lee, Changhan; Cho, Youngji; Han, Mincheol; Bae, Chanyoung; Jeon, Junsu; Song, Yujin; Chang, Jiho; Ha, Yun-Su; Park, Jae-Jin; Lee, Moonjin
- Issue Date
- 1월-2024
- Publisher
- Korean Physical Society
- Keywords
- Hazardous chemicals; Indium-tin-oxide; Metal-oxide nanoparticles; Organic binder; Surface-resistive sensor
- Citation
- New Physics: Sae Mulli, v.74, no.1, pp 100 - 106
- Pages
- 7
- Journal Title
- New Physics: Sae Mulli
- Volume
- 74
- Number
- 1
- Start Page
- 100
- End Page
- 106
- URI
- https://www.kriso.re.kr/sciwatch/handle/2021.sw.kriso/10680
- DOI
- 10.3938/NPSM.74.100
- ISSN
- 0374-4914
2289-0041
- Abstract
- A sensor that can measure the concentration of harmful chemicals in water using changes in surface resistance was fabricated using a metal oxide nanoparticle film, and the changes in sensor performance due to surface treatment processes were investigated. The influence of the surface residue of the organic binder used for film printing was focused on, and the changes in the properties of the film and sensor were observed. To remove the residual binder, a cleaning process was additionally introduced to the existing sintering process, and the changes in the properties of the ITO:CB film were observed according to the cleaning time, and the surface treatment time was optimized. It was confirmed that the sensor response improved as the cleaning time increased, and the optimal surface treatment conditions were determined to ensure good sensor operation. ? 2024 Korean Physical Society. All rights reserved.
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